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EOTPR 2000 - Electro Optical Terahertz Pulse Reflectometry

Electro Optical Terahertz Pulse Reflectometry (EOTPR) is an innovative time domain reflectometry (TDR) system that has been successfully developed by Intel Corporation and TeraView Ltd


It allows THz TDR analysis of semiconductor packages and offers a step change in resolution compared to conventional millimeter wave systems. The injected terahertz pulse reflects off faults within the device under test (DUT) locating their position with accuracy of 5 μm.

The unit is used to identify and quickly isolate faults on the interconnects of advanced packages, such as:
Flip Chip
Package on Package (PoP)
Through-silicon Vias (TSV)


Key advantages of the EOTPR2000 system include:
Non-destructive rapid fault isolation - minutes rather than days
Ability to isolate faults unseen with other fault isolation technologies (ex.conventional TDR)
Identification of weak connections that may lead to future faults
Isolation of shorts, dead opens, and resistive opens
10 micron accuracy

TeraView-EOTPR2000

Teraview EOTPR 2000 DataSheet