EOTPR 4000 - Electro Optical Terahertz Pulse Reflectometry
The EOTPR 4000 system is configured with an automated probe station which is capable of placing the probe tip to +/- 5 μm precision, while maintaining the EOTPR’s world leading sub-5 μm fault isolation accuracy.
This combination allows users to directly probe TSV tips and copper pillars.
Key Features
Pre-scan station to map contact location and height.
Data acquisition time of less than 5 seconds per pin.
Software that will drive the automated probe station and pre-scan station.
Availability of both manual mode and automated mode for probing.
User interface software to manage data display and recipe creation.
Probe tip placement..
Key Features
